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Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series (XLA-50H5-2-XAQ1A)

Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series (XLA-50H5-2-XAQ1A)
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  • ■ SMC Product Line
    Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

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    Air cylinder-related product pages will be released on this site on an ad-hoc basis.
    CQ2/MG types, etc., are already available.
    *Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
    *The information above is correct as of October 2018.
  • Some of the items are scheduled to be discontinued as of end of March in 2023. The manufacturer keep the items produced but they are not available with Misumi.
    There are not the replacement items and the plan to resumption of sale. Please check the quotation and order screen for details.

  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Product Description

Vacuum regulator with low outgassing.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Little heavy metal contamination.

Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series Specifications

XLA external appearance (side)

XLA external appearance (side)

ModelXLA-16XLA (V)-25XLA-40XLA-50XLA-63XLA-80
Valve TypeNormally closed (pressurize to open, spring seal)
FluidsInert gas vacuum
Operating Temperature (°C)XLA5 to 60 (5 to 150 for high temperature type)
Operating Pressure Pa (abs)1 × 10-6 to atmospheric pressure
Conductance L/s Note 1:5144580160200
Amount of leakage Pa·m3/sInternalFor standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation
ExternalFor standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation
Flange TypeKF (NW)KF (NW) / K (DN)
Main MaterialMain body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material)
Surface TreatmentExternal: hard anodized aluminum, Internal: base material
Pilot Pressure MPa (G)0.4 to 0.7
Pilot Port Connection Port DiameterXLAM5Rc 1/8
Weight (kg)XLA0.250.451.11.62.95.0

Note 1: Conductance is the same as that of an elbow with the same dimensions.

 

Structure/Operation

With solenoid valve

With solenoid valve

Valve side exhaust

Valve side exhaust

By applying pressure from the pilot port, the valve linked to the piston overcomes the spring force and actuating force and opens.
XLAV normally applies pilot pressure to the 1 (P) port. The valve opens when the solenoid valve is on and closes when it is off.

Drawing

XLA air-operated type dimensional drawing

XLA air-operated type dimensional drawing

Note: A, B, and C in the figure above indicate the heater mounting positions. The heater mounting positions differ by the heater type. Refer to the manufacturer's catalog for more details.

 

(Unit: mm)

 

ModelABCDE Note 1:FnFdGH
XLA-1640103381-30-1740
XLA-25501134811240-2639
XLA-40651586621155-4163
XLA-50701707921175-5268
XLA-638819610031187957069
XLA-80902351173111141108396

Note 1: Dimension E applies when heater option is included. (Lead wire length: approx. 1 m)

Notes

  • *See the catalog for information on products other than those above.
  • *The product images are representative images only.
Part Number
XLA-50H5-2-XAQ1A
Part NumberPriceMinimum Order Qty.Volume DiscountDays to ShipSố ngày giao hàngRoHSSolenoid Type Flange Type Flange Nominal Indicator Pilot Port Direction Temperature Range
(°C)
Switch Part Number Number of Switches Seal material Body Surface Treatment Seal Change Location Length of Lead Wire for Switch
(m)
Heater Yes/No

-

1 Piece(s) Quote -SingleNW50No indicatorFlange side5 to 150°C (with heater for 120℃)No auto-switch (no magnet)No auto switchKalrez (Formula No.: 4079)External: hard anodized aluminum, internal: anodic oxidationValve seal 1 / valve seal 2 / external seal-With heater for 120℃

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Basic InformationThông tin cơ bản

Type Air-Actuated Vacuum Valve Application Single Use Mounting Orientation Direct
Number of Ports 3-Port Valve Switching Type 2-Position Normally Closed Pipe Port Type Flange
Seal Type Bellows Seal

Please check the type/dimensions/specifications of the part XLA-50H5-2-XAQ1A in the Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series series.Vui lòng kiểm tra kiểu/kích thước/thông số kỹ thuật của phần XLA-50H5-2-XAQ1A trong chuỗi Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series.

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XLA-16-2-XP1A
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XLA-50H5-2-XQ1A
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XLA-50H5-2M9J/-XA
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipSố ngày giao hàngRoHSSolenoid Type Flange Type Flange Nominal Indicator Pilot Port Direction Temperature Range
(°C)
Switch Part Number Number of Switches Seal material Body Surface Treatment Seal Change Location Length of Lead Wire for Switch
(m)
Heater Yes/No

-

1 Piece(s) Quote -SingleNW16No indicatorFlange side5 to 60℃ (no heater)No auto-switch (no magnet)No auto switchBarrel Perfluoro (Formula No.: 70W)External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal-None

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1 Piece(s) Quote -SingleNW16No indicatorFlange side5 to 60℃ (no heater)No auto-switch (no magnet)No auto switchVMQ (Formula No.: 1232-70)External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal-None

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1 Piece(s) Quote -SingleNW16No indicatorFlange side5 to 60℃ (no heater)No auto-switch (no magnet)No auto switchFKM for Plasma (Formula No.: 3310-75)External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal-None

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1 Piece(s) Quote -SingleNW50No indicatorFlange side5 to 150°C (with heater for 120℃)No auto-switch (no magnet)No auto switchKalrez (Formula No.: 4079)External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal-With heater for 120℃

-

1 Piece(s) Quote --NW50No indicatorFlange side5 to 150℃No auto-switch (no magnet)No auto switchFKM for Plasma (Formula No.: 3310-75)External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal-With heater for 120℃

-

1 Piece(s) Quote --NW50No indicatorFlange side5 to 150℃No auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)External: hard anodized aluminum, internal: anodic oxidationNone-With heater for 120℃