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Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series (Part Number)

Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series
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thận trọng

  • ■ SMC Product Line
    Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

    ■ Products Planned for Online Release
    Air cylinder-related product pages will be released on this site on an ad-hoc basis.
    CQ2/MG types, etc., are already available.
    *Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
    *The information above is correct as of December 2018.
  • Some of the items are scheduled to be discontinued as of end of March in 2023. The manufacturer keep the items produced but they are not available with Misumi.
    There are not the replacement items and the plan to resumption of sale. Please check the quotation and order screen for details.

  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Product Description

A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
・ Achieves system compactness and piping savings
・ Prevents dust from rolling up in the chamber when exhausting
・ Adjustable initial exhaust valve flow rate
・ Air operated type / with solenoid valve
・ Since there is little outgas, the pump capacity can be small and the exhaust time can be shortened
・ It does not contain heavy metals such as Ni (nickel) and Cr (chromium), and the sputtering rate is low, so there is little heavy metal contamination on the wafer
・ Strong against fluorine
· Uniform baking temperature. Good thermal conductivity, uniform temperature throughout the body, drastically reducing product adhesion
· Lightweight and compact

Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting, Bellows Seal, O-Ring Seal, XLD Series Specifications

XLD Series external appearance

XLD Series external appearance

XLD Series operating port direction

XLD Series operating port direction

ModelXLD-25XLD-40XLD-50XLD-63XLD-80
Valve TypeAlways closed (spring return and seal) (both main and initial exhaust valves)
FluidsInert gas vacuum
Operating Temperature (°C)XLD5 to 60 (5 to 150 for high temperature type)
Operating Pressure Pa (abs)1 × 10-6 to atmospheric pressure
Conductance L/s Note 1:Main Exhaust Valve144580160200
Initial Exhaust Valve0.5 to 32 to 82.5 to 114 to 184 to 18
Amount of leakage Pa·m3/sInternalFor standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation
ExternalFor standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation
Flange TypeKF (NW)KF (NW) / K (DN)
Main Material Note 3:Main body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material)
Surface TreatmentExternal: hard anodized aluminum, Internal: base material
Pilot Pressure MPa (G)0.4 to 0.7 (both main and initial exhaust valves)
Pilot Port Connection Port DiameterXLDM5Rc 1/8
Weight (kg)XLD0.51.21.83.45.6

Note 1: The main exhaust valve conductance is the value for the "molecular flow" of an elbow with the same dimensions. The initial exhaust valve conductance is the "viscous flow" value.
Note 2: For valve heater specifications, see "Common Option (1) Heater" in the manufacturer's catalog.
Note 3: A coating of vacuum grease (Y-VAC2) has been applied to the seal-material sliding section (initial exhaust valve sliding part) of the vacuum part.

Product Drawing

XLD air-operated type dimensional drawing

XLD air-operated type dimensional drawing

 

(Unit: mm)

 

ModelABCDEFnFdGHJK
XLD-25501234811240-2641167.5
XLD-40651706621155-41632015
XLD-50701837921175-52682017.5
XLD-6388217100311879570722020
XLD-809025611731111411083982026.5

Note 1: Dimension E applies when heater option is included. (Lead wire length: approx. 1 m)
Note 2: A, B, and C in the figure above indicate the heater mounting positions. The heater mounting positions differ by the heater type. Refer to the manufacturer's catalog for replacement heater part numbers and mounting positions.

Product Diagram

XLD Series diagram

XLD Series diagram

*Refer to the manufacturer's catalog for maintenance parts.

Product Working Principle

Initial exhaust valve conductance settings graph

Initial exhaust valve conductance settings graph

  • 1. Initial exhaust valve opening adjustment
    Adjust the initial exhaust rate before use without applying pilot pressure to pilot port S. Set the initial exhaust rate to zero by turning the adjustment nut clockwise until it stops. (Do not use tools.) Adjust the initial exhaust rate by turning the adjustment nut counterclockwise.
  • 2. Opening of the initial exhaust valve (valve S)
    When pilot pressure is applied to pilot port S, valve S separates from the valve S seal assembly and opens by the adjusted amount.
  • 3. Opening of the main exhaust valve (valve M)
    When pilot pressure is applied to pilot port M, the M valve separates from the body seat section and opens fully.
  • 4. Closing of the initial and main exhaust valves
    Remove the pilot pressure from pilot port S and pilot port M to return the S and M valves to their previous positions and seal them.

Note: The adjustment nut does not rotate during valve operation. However, rotation of the adjustment nut can be fixed to prevent operation errors. To fix the adjustment nut after setting it, tighten it to the torque shown under "A" Section Thread Tightening Torque" below. (Applying excessive torque can result in damaged components or abnormal noises.)

""A" Section Thread Tightening Torque

  • XLD-25/XLD-40/XLD-50: 0.08 N·m (0.8 kgf·cm) or less
  • XLD-63/XLD-80: 0.3 N·m (3 kgf·cm) or less

Product Options Descriptions

  • Auto switch (for main exhaust valve)
    The magnet actuates the auto switch. Uses 2 auto switches to detect the "opening and closing" positions and 1 auto switch to detect one of either the "open" or "closing" position. Auto switches operate at ordinary temperatures only (5 to 60°C).
  • Heater
    Simple heating using thermistors. The valve body can be heated to 100°C or 120°C, but this will differ depending on the valve size. The type and number of thermistors used will vary depending on the size and temperature setting. For high temperature specifications, the bonnet assembly is a heat resistant structure. This is not applicable for types with solenoid valves.

Notes

  • *The body material is A6063, the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but other materials can be selected (see section on part number notation). Check that the fluid in use will not damage the selected material.
  • *Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
  • *The temperature of the switch part on the auto switch must be no higher than 60°C.
  • *When using with heaters (thermistors), install a device for preventing overheating.
  • *Refer to the manufacturer's catalog for parts other than those detailed above.
Part Number
XLD-50H5
XLD-50K
XLD-50K-A93A
XLD-50K-M9NA
XLD-50KH0
XLD-50L
XLD-50L-A93A
XLD-50L-A93LA
XLD-50L-M9//
XLD-50L-M9//-XP1A
XLD-50L-M9BA
XLD-50L-M9BA-XAN1A
XLD-50L-M9BA-XS1A
XLD-50L-M9BB
XLD-50L-M9BLA
XLD-50L-M9NA
XLD-50L-M9NA-XQ1A
XLD-50L-M9NB
XLD-50L-M9NB-XP1A
XLD-50L-M9NC
XLD-50L-M9NLA
XLD-50L-M9NLB
XLD-50L-M9NLB-XAP1A
XLD-50L-M9NLB-XP1A
XLD-50L-M9NMA
XLD-50L-M9NZA
XLD-50L-M9NZC
XLD-50L-M9PA
XLD-50LH0
XLD-50M
XLD-50M-A93A
XLD-50M-M9BA
XLD-50M-M9NA
XLD-50M-M9NLA
XLD-50MH0
XLD-63
XLD-63-A93A
XLD-63-A93LA
XLD-63-M9//
XLD-63-M9BA
XLD-63-M9BC
XLD-63-M9NA
XLD-63-M9NC
XLD-63H0
XLD-63H4
XLD-63H5
XLD-63L
XLD-63L-A93A
XLD-63L-M9//
XLD-63L-M9//-XS1A
XLD-63L-M9BA
XLD-63L-M9BA-XS1A
XLD-63L-M9NA
XLD-63L-M9PA
XLD-63M
XLD-63M-M9BA
XLD-63MH0
XLD-80
XLD-80-A93A
XLD-80-A93B
XLD-80-M9//
XLD-80-M9BA
XLD-80-M9BB
XLD-80-M9BC
XLD-80-M9BLA
XLD-80-M9NA
XLD-80-M9NB
XLD-80-M9NC
XLD-80-M9NLA
XLD-80-M9PLA
XLD-80-XA
XLD-80-XAQ1A
XLD-80H0
XLD-80H0-XN1A
XLD-80H0-XQ1A
XLD-80H4
XLD-80H4-XQ1B
XLD-80H5
XLD-80K-M9BA
XLD-80K-M9PB
XLD-80L
XLD-80L-M9BA
XLD-80L-M9BA-XS1A
XLD-80L-M9NA
XLD-80L-M9NA-XN1A
XLD-80L-M9NB
XLD-80L-M9NC
XLD-80LH0
XLD-80LH4
XLD-80LH5
Part NumberPriceMinimum Order Qty.Volume DiscountDays to ShipSố ngày giao hàngRoHSFlange Type Flange Nominal Sonic Speed Conductance Pilot Port Direction Temperature Range
(°C)
Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s)
Body Surface Treatment Seal Change Location Length of Lead Wire for Switch
(m)
Heater Yes/No

-

1 Piece(s) Quote -KF5080L/SFlange side5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-With heater for 120℃

-

1 Piece(s) Quote -KF5080L/SFlange surface, left5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote -KF5080L/SFlange surface, left5 to 60D-A93 reed auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF5080L/SFlange surface, left5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF5080L/SFlange surface, left5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

32,428,000 VND

1 Piece(s) 32 Day(s) -KF5080L/SFlange surface, back5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote -KF5080L/SFlange surface, back5 to 60D-A93 reed auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF5080L/SFlange surface, back5 to 60D-A93 reed auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

-

1 Piece(s) Quote -KF5080L/SFlange surface, back5 to 60No auto-switch (with built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote 10KF5080L/SFlange surface, back5 to 60No auto-switch (with built-in magnet)No auto switchBarrel Perfluoro (Compound No.: 70 W)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, Internal: base materialValve seal / external seal / S valve seal assembly / O-ring for fixing-None

33,966,000 VND

1 Piece(s) 32 Day(s) -KF5080L/SFlange surface, back5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote 10KF5080L/SFlange surface, back5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)EPDM (Formula No.: 2101-80)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, internal: anodic oxidationValve seal / external seal / S valve seal assembly / O-ring for fixing0.5None

27,800,800 VND

1 Piece(s) 42 Day(s) 10KF5080L/SFlange surface, back5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)VMQ (Formula No.: 1232-70)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, Internal: base materialValve seal / external seal / S valve seal assembly / O-ring for fixing0.5None

-

1 Piece(s) Quote 10KF5080L/SFlange surface, back5 to 60M9BWith 1 pc. (Detection position: Valve opening)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF5080L/SFlange surface, back5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

-

1 Piece(s) Quote -KF5080L/SFlange surface, back5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote 10KF5080L/SFlange surface, back5 to 60M9NWith 2 pcs. (Detection position: Valve opening and closing)Kalrez (Compound No.: 4079)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, Internal: base materialValve seal / external seal / S valve seal assembly / O-ring for fixing0.5None

-

1 Piece(s) Quote -KF5080L/SFlange surface, back5 to 60D-M9N solid-state auto switch1 pc. valve openFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote 10KF5080L/SFlange surface, back5 to 60M9NWith 1 pc. (Detection position: Valve opening)Barrel Perfluoro (Compound No.: 70 W)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, Internal: base materialValve seal / external seal / S valve seal assembly / O-ring for fixing0.5None

-

1 Piece(s) Quote -KF5080L/SFlange surface, back5 to 60D-M9N solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF5080L/SFlange surface, back5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

-

1 Piece(s) Quote -KF5080L/SFlange surface, back5 to 60D-M9N solid-state auto switch1 pc. valve openFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

-

1 Piece(s) Quote 10KF5080L/SFlange surface, back5 to 60M9NWith 1 pc. (Detection position: Valve opening)Barrel Perfluoro (Compound No.: 70 W)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, internal: anodic oxidationValve seal / external seal / S valve seal assembly / O-ring for fixing3None

-

1 Piece(s) Quote 10KF5080L/SFlange surface, back5 to 60M9NWith 1 pc. (Detection position: Valve opening)Barrel Perfluoro (Compound No.: 70 W)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, Internal: base materialValve seal / external seal / S valve seal assembly / O-ring for fixing3None

-

1 Piece(s) Quote -KF5080L/SFlange surface, back5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone1None

-

1 Piece(s) Quote -KF5080L/SFlange surface, back5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone5None

-

1 Piece(s) Quote -KF5080L/SFlange surface, back5 to 60D-M9N solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone5None

-

1 Piece(s) Quote -KF5080L/SFlange surface, back5 to 60D-M9P solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF5080L/SFlange surface, back5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote -KF5080L/SFlange surface, right5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote -KF5080L/SFlange surface, right5 to 60D-A93 reed auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF5080L/SFlange surface, right5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF5080L/SFlange surface, right5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF5080L/SFlange surface, right5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

-

1 Piece(s) Quote -KF5080L/SFlange surface, right5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote -KF63160L/SFlange side5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote -KF63160L/SFlange side5 to 60D-A93 reed auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF63160L/SFlange side5 to 60D-A93 reed auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

-

1 Piece(s) Quote -KF63160L/SFlange side5 to 60No auto-switch (with built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote -KF63160L/SFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF63160L/SFlange side5 to 60D-M9B solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF63160L/SFlange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF63160L/SFlange side5 to 60D-M9N solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF63160L/SFlange side5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote 10KF63160L/SFlange side5 to 150No auto-switch (no built-in magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone-With heater for 100°C

-

1 Piece(s) Quote -KF63160L/SFlange side5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-With heater for 120℃

-

1 Piece(s) Quote -KF63160L/SFlange surface, back5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

47,384,000 VND

1 Piece(s) 32 Day(s) -KF63160L/SFlange surface, back5 to 60D-A93 reed auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF63160L/SFlange surface, back5 to 60No auto-switch (with built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote -KF63160L/SFlange surface, back5 to 60No auto-switch (with built-in magnet)No switchVMQ 1232-70Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal / external seal / S valve seal assembly / O-ring for fixing-None

47,990,000 VND

1 Piece(s) 32 Day(s) -KF63160L/SFlange surface, back5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote -KF63160L/SFlange surface, back5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedVMQ 1232-70Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal / external seal / S valve seal assembly / O-ring for fixing0.5None

-

1 Piece(s) Quote -KF63160L/SFlange surface, back5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote -KF63160L/SFlange surface, back5 to 60D-M9P solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote -KF63160L/SFlange surface, right5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote -KF63160L/SFlange surface, right5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF63160L/SFlange surface, right5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote -KF80200L/SFlange side5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

64,902,000 VND

1 Piece(s) 32 Day(s) -KF80200L/SFlange side5 to 60D-A93 reed auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote 10KF80200L/SFlange side5 to 60A93With 1 pc. (Detection position: Valve opening)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF80200L/SFlange side5 to 60No auto-switch (with built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote -KF80200L/SFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF80200L/SFlange side5 to 60D-M9B solid-state auto switch1 pc. valve openFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

64,739,000 VND

1 Piece(s) 32 Day(s) -KF80200L/SFlange side5 to 60D-M9B solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF80200L/SFlange side5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone3None

-

1 Piece(s) Quote -KF80200L/SFlange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF80200L/SFlange side5 to 60D-M9N solid-state auto switch1 pc. valve openFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF80200L/SFlange side5 to 60D-M9N solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF80200L/SFlange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

-

1 Piece(s) Quote -KF80200L/SFlange side5 to 60D-M9P solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

-

1 Piece(s) Quote 10KF80200L/SFlange side5 to 60No auto-switch (no built-in magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, internal: anodic oxidationNone-None

-

1 Piece(s) Quote 10KF80200L/SFlange side5 to 60No auto-switch (no built-in magnet)No auto switchKalrez (Compound No.: 4079)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, internal: anodic oxidationValve seal / external seal / S valve seal assembly / O-ring for fixing-None

-

1 Piece(s) Quote -KF80200L/SFlange side5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote 10KF80200L/SFlange side5 to 150No auto-switch (no built-in magnet)No auto switchEPDM (Formula No.: 2101-80)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, Internal: base materialValve seal / external seal / S valve seal assembly / O-ring for fixing-None

-

1 Piece(s) Quote 10KF80200L/SFlange side5 to 150No auto-switch (no built-in magnet)No auto switchKalrez (Compound No.: 4079)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, Internal: base materialValve seal / external seal / S valve seal assembly / O-ring for fixing-None

-

1 Piece(s) Quote -KF80200L/SFlange side5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-With heater for 100°C

-

1 Piece(s) Quote 10KF80200L/SFlange side5 to 150No auto-switch (no built-in magnet)No auto switchKalrez (Compound No.: 4079)Internal: 1.3 × 10^-8 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialValve seal / external seal / S valve seal assembly / O-ring for fixing-With heater for 100°C

-

1 Piece(s) Quote -KF80200L/SFlange side5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-With heater for 120℃

-

1 Piece(s) Quote -KF80200L/SFlange surface, left5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF80200L/SFlange surface, left5 to 60D-M9P solid-state auto switch1 pc. valve openFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF80200L/SFlange surface, back5 to 60No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote -KF80200L/SFlange surface, back5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF80200L/SFlange surface, back5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedVMQ 1232-70Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal / external seal / S valve seal assembly / O-ring for fixing0.5None

-

1 Piece(s) Quote -KF80200L/SFlange surface, back5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote 10KF80200L/SFlange surface, back5 to 60M9NWith 2 pcs. (Detection position: Valve opening and closing)EPDM (Formula No.: 2101-80)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, Internal: base materialValve seal / external seal / S valve seal assembly / O-ring for fixing0.5None

-

1 Piece(s) Quote -KF80200L/SFlange surface, back5 to 60M9NWith 1 pc. (Detection position: Valve opening)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF80200L/SFlange surface, back5 to 60D-M9N solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote -KF80200L/SFlange surface, back5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote -KF80200L/SFlange surface, back5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-With heater for 100°C

-

1 Piece(s) Quote -KF80200L/SFlange surface, back5 to 150No auto-switch (no built-in magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-With heater for 120℃

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Basic InformationThông tin cơ bản

Type Air-Actuated Vacuum Valve Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Switching Type 2-Position Normally Closed Pipe Port Type Flange
Seal Type Bellows Seal