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Product DetailSpecification/DimensionsĐặc điểm kỹ thuật / Kích thướcĐặc điểm kỹ thuật / Kích thước
-
type
- XLDV
- XLDV-25
- XLDV-40
- XLDV-50
- XLDV-63
- XLDV-80
-
Flange Type
- KF
- K
-
Flange Nominal
- 25
- 40
- 50
- 63
- 80
-
Voltage
- DC12V
- DC24V
- AC100V
- AC200V
- AC110V
- AC220V
-
Sonic Speed Conductance
-
Pilot Port Direction
- Flange surface, back
- Flange surface, left
- Flange surface, right
-
Switch Part Number
-
Number of Switches
- 1 pc. valve closed
- 1 pc. valve open
- 2 pcs. valve open/closed
- With 2 pcs. (Detection position: Valve opening and closing)
- No auto switch
- No switch
-
Seal material
-
Amount of leakage(Pa·m3/s)
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-11
- Internal: 1.3 × 10-10, External: 1.3 × 10-11
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-9
-
Electrical Entry Method
- Grommet (lead wire length: 300 mm)
- Grommet (lead wire length: 600 mm)
- L-type plug connector
- M-type plug connector
-
Light/Surge Voltage Suppressor
- None
- With light and surge voltage suppressor
- With light and surge voltage suppressor (non-polarized type)
- With surge voltage suppressor
-
Body Surface Treatment
- External: hard anodized aluminum, Internal: base material
- External: hard anodized aluminum, internal: anodic oxidation
-
Seal Change Location
-
CE-marked
- CE-marked
- None
- Not compatible
-
Length of Lead Wire for Switch(m)
- 0.5
- 1
- 3
- 5
-
CADCAD
- 2D
- 3D
Days to ShipSố ngày giao hàng
-
- Alltất cả các
- 31 Day(s) or Less
Specify AlterationsChỉ định thay đổi
Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve (XLDV-50K-M9BA-5LZ)
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Caution
thận trọng
- ■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018. - The product images may be representative images only. Refer to the manufacturer's catalog for shape details.
Similar Products
Product DetailProduct Description
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting, Bellows Seal, O-Ring Seal, XLDV Series, Air-Operated Type with Solenoid Valve Specifications
XLDV Series external appearance
XLDV Series operating port direction
| Model | XLD (V)-25 | XLD(V)-40 | XLD(V)-50 | XLD(V)-63 | XLD(V)-80 | |
|---|---|---|---|---|---|---|
| Valve Type | Always closed (spring return and seal) (both main and initial exhaust valves) | |||||
| Fluids | Inert gas vacuum | |||||
| Operating Temperature (°C) | XLDV | 5 to 60 (5 to 150 for high temperature type) | ||||
| 5 to 50 | ||||||
| Operating Pressure Pa (abs) | 1 × 10-6 to atmospheric pressure | |||||
| Conductance L/s Note 1: | Main Exhaust Valve | 14 | 45 | 80 | 160 | 200 |
| Initial Exhaust Valve | 0.5 to 3 | 2 to 8 | 2.5 to 11 | 4 to 18 | 4 to 18 | |
| Amount of leakage Pa·m3/s | Internal | For standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation | ||||
| External | For standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation | |||||
| Flange Type | KF (NW) | KF (NW) / K (DN) | ||||
| Main Material Note 3: | Main body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material) | |||||
| Surface Treatment | External: hard anodized aluminum, Internal: base material | |||||
| Pilot Pressure MPa (G) | 0.4 to 0.7 (both main and initial exhaust valves) | |||||
| Pilot Port Connection Port Diameter | XLDV | M5: 1 (P), 3 (R) ports | ||||
| Weight (kg) | XLDV | 0.57 | 1.3 | 1.9 | 3.5 | 5.7 |
Note 1: The main exhaust valve conductance is the value for the "molecular flow" of an elbow with the same dimensions. The initial exhaust valve conductance is the "viscous flow" value.
Note 2: For valve heater specifications, see "Common Option (1) Heater" in the manufacturer's catalog.
Note 3: A coating of vacuum grease (Y-VAC2) has been applied to the seal-material sliding section (initial exhaust valve sliding part) of the vacuum part.
Product Drawing
(Unit: mm)
XLDV-25 type with solenoid valve dimensional drawing
XLDV-40, XLDV-50, XLDV-63, XLDV-80 type with solenoid valve dimensional drawing
| Model | A | B | C | Fn | Fd | G | M | N | K |
|---|---|---|---|---|---|---|---|---|---|
| XLDV-40 | 65 | 170 | 66 | 55 | - | 41 | 48.5 | 53.5 | 15 |
| XLDV-50 | 70 | 183 | 79 | 75 | - | 52 | 55 | 57.5 | 17.5 |
| XLDV-63 | 88 | 217 | 100 | 87 | 95 | 70 | 66.5 | 72.2 | 20 |
| XLDV-80 | 90 | 256 | 117 | 114 | 110 | 83 | 75 | 82.6 | 26.5 |
Product Diagram
Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting, Bellows Seal, O-Ring Seal diagram
XLDV-25 type with solenoid valve diagram
XLDV-40, XLDV-50, XLDV-63, XLDV-80 type with solenoid valve diagram
*Refer to the manufacturer's catalog for maintenance parts.
Product Working Principle
Initial exhaust valve conductance settings graph
- 1. Initial exhaust valve opening adjustment
Adjust the initial exhaust rate before use without applying pilot pressure to pilot port S. Set the initial exhaust rate to zero by turning the adjustment nut clockwise until it stops. (Do not use tools.) Adjust the initial exhaust rate by turning the adjustment nut counterclockwise. - 2. Opening of the initial exhaust valve (valve S)
Pilot pressure is constantly applied to the 1 (P) port. The valve opens by the adjusted amount when the initial exhaust solenoid valve is turned ON. - 3. Opening of the main exhaust valve (valve M)
Pilot pressure is constantly applied to the 1 (P) port. The valve opens fully when the main exhaust solenoid valve is turned ON. - 4. Closing of the initial and main exhaust valves
Turning off the initial and main exhaust solenoid valves resets the S and M valves and creates a seal.
Note: The adjustment nut does not rotate during valve operation. However, rotation of the adjustment nut can be fixed to prevent operation errors. To fix the adjustment nut after setting it, tighten it to the torque shown under "A" Section Thread Tightening Torque" below. (Applying excessive torque can result in damaged components or abnormal noises.)
""A" Section Thread Tightening Torque
- XLD-25V/XLDV-40/XLDV-50: 0.08 N·m (0.8 kgf·cm) or less
- XLDV-63/XLDV-80: 0.3 N·m (3 kgf·cm) or less
Product Options Descriptions
- Auto switch (for main exhaust valve)
The magnet actuates the auto switch. Uses 2 auto switches to detect the "opening and closing" positions and 1 auto switch to detect one of either the "open" or "closing" position. Auto switches operate at ordinary temperatures only (5 to 60°C). - Heater
Simple heating using thermistors. The valve body can be heated to 100°C or 120°C, but this will differ depending on the valve size. The type and number of thermistors used will vary depending on the size and temperature setting. For high temperature specifications, the bonnet assembly is a heat resistant structure. This is not applicable for types with solenoid valves.
Notes
- *The body material is A6063, the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but other materials can be selected (see section on part number notation). Check that the fluid in use will not damage the selected material.
- *Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
- *The temperature of the switch part on the auto switch must be no higher than 60°C.
- *When using with heaters (thermistors), install a device for preventing overheating.
- *For types with a solenoid valve, keep the solenoid valve part at a temperature no higher than 50°C.
- *Refer to the manufacturer's catalog for product information not detailed above.
| Part Number |
|---|
| XLDV-50K-M9BA-5LZ |
| Part Number | Price | Minimum Order Qty. | Volume Discount | Days to ShipSố ngày giao hàng | RoHS | Flange Type | Flange Nominal | Voltage | Sonic Speed Conductance | Pilot Port Direction | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Electrical Entry Method | Light/Surge Voltage Suppressor | Body Surface Treatment | Seal Change Location | CE-marked | Length of Lead Wire for Switch (m) |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | - | KF | 50 | DC24V | 80L/S | Flange surface, left | D-M9B solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | L-type plug connector | With light and surge voltage suppressor | External: hard anodized aluminum, Internal: base material | None | None | 0.5 |
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Basic InformationThông tin cơ bản
| Type | High Vacuum Solenoid | Application | Single Use | Mounting Orientation | Direct |
|---|---|---|---|---|---|
| Number of Ports | 2-Port Valve | Solenoid Type | Single | Switching Type | 2-Position Normally Closed |
| Driving Type | Directly Operated | Pipe Port Type | Flange | Seal Type | Bellows Seal |
Please check the type/dimensions/specifications of the part XLDV-50K-M9BA-5LZ in the Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve series.Vui lòng kiểm tra kiểu/kích thước/thông số kỹ thuật của phần XLDV-50K-M9BA-5LZ trong chuỗi Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve.
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer toCác thông số kỹ thuật và kích thước của mã sản phẩm có thể không được bao phủ đầy đủ. Để biết chi tiết chính xác, hãy tham khảo manufacturer catalogsdanh mục nhà sản xuất ..
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| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to ShipSố ngày giao hàng | RoHS | Flange Type | Flange Nominal | Voltage | Sonic Speed Conductance | Pilot Port Direction | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Electrical Entry Method | Light/Surge Voltage Suppressor | Body Surface Treatment | Seal Change Location | CE-marked | Length of Lead Wire for Switch (m) |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | - | KF | 25 | AC200V | 14L/S | Flange surface, left | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | L-type plug connector | With light and surge voltage suppressor | External: hard anodized aluminum, Internal: base material | None | None | - | ||
- | 1 Piece(s) | Quote | - | KF | 25 | DC24V | 14L/S | Flange surface, left | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | Grommet (lead wire length: 300 mm) | None | External: hard anodized aluminum, Internal: base material | None | None | - | ||
- | 1 Piece(s) | Quote | - | KF | 25 | DC24V | 14L/S | Flange surface, left | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | Grommet (lead wire length: 300 mm) | With surge voltage suppressor | External: hard anodized aluminum, Internal: base material | None | None | - | ||
- | 1 Piece(s) | Quote | - | KF | 50 | DC24V | 80L/S | Flange surface, left | D-M9B solid-state auto switch | 1 pc. valve closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | L-type plug connector | With light and surge voltage suppressor | External: hard anodized aluminum, Internal: base material | None | None | 0.5 | ||
- | 1 Piece(s) | Quote | - | KF | 50 | AC100V | 80L/S | Flange surface, left | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | L-type plug connector | With light and surge voltage suppressor | External: hard anodized aluminum, Internal: base material | None | None | 0.5 | ||
- | 1 Piece(s) | Quote | - | KF | 50 | DC24V | 80L/S | Flange surface, left | D-M9N solid-state auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | Grommet (lead wire length: 300 mm) | None | External: hard anodized aluminum, Internal: base material | None | None | 0.5 |
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