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Caution
thận trọng
A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.
XLH Series external appearance
Model | XLH-16 | XLH-25 | XLH-40 | XLH-50 | |
---|---|---|---|---|---|
Fluids | Inert gas vacuum | ||||
Operating Temperature (°C) | 5 to 150 | ||||
Operating Pressure Pa (abs) | 1 × 10-6 to atmospheric pressure | ||||
Conductance L/s Note 1: | 5 | 14 | 45 | 80 | |
Amount of leakage Pa·m3/s | Internal | For standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation | |||
External | For standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation | ||||
Flange Type | KF (NW) | ||||
Main Material | Main body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material) | ||||
Surface Treatment | External: hard anodized aluminum, Internal: base material | ||||
Actuation torque N·m | 0.1 ≤ | 0.15≦ | 0.35≦ | 0.5≦ | |
Handle revolutions | 5 | 7 | 10 | 13 | |
Weight (kg) | 0.23 | 0.41 | 1.05 | 1.62 |
Note 1: Conductance is the same as that of an elbow with the same dimensions.
Note 2: For valve heater specifications, see "Common Option (1) Heater" in the manufacturer's catalog.
(Unit: mm)
XLH Series dimensional drawing
Model | A | B | C | D | E Note 1: | F | G | H |
---|---|---|---|---|---|---|---|---|
XLH-16 | 40 | 100.5 | 38 | 1 | - | 30 | 17 | 35 |
XLH-25 | 50 | 114 | 48 | 1 | 12 | 40 | 26 | 41 |
XLH-40 | 65 | 162.5 | 66 | 2 | 11 | 55 | 41 | 57 |
XLH-50 | 70 | 179.5 | 79 | 2 | 11 | 75 | 52 | 70 |
Note 1: Dimension E applies when heater option is included. (Lead wire length: approx. 1 m)
Note 2: A, B, and C in the figure above indicate the heater mounting positions. The heater mounting positions differ by the heater type. Refer to the manufacturer's catalog for replacement heater part numbers and mounting positions.
XLH Series diagram
*Refer to the manufacturer's catalog for maintenance parts.
The valve opens by rotating the handle to the left. The handle does not move up and down. The indicator shows whether or not the valve is open or closed.
As the the handle turns to the right, the valve begins to close. The valve will be sealed when you no longer feel the turning force. The sealing force for the valve is provided by spring and is constant.
Part Number |
---|
XLH-16-XN1A |
Part Number | Price | Minimum Order Qty. | Volume Discount | Days to ShipSố ngày giao hàng | RoHS | Flange Nominal | Sonic Speed Conductance | Seal material | Amount of leakage (Pa·m3/s) | Body Surface Treatment | Seal Change Location | Heater Yes/No |
---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | - | 16 | 5L/S | EPDM 2101-80 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None |
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Type | Manual Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
---|---|---|---|---|---|
Number of Ports | 2-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
Flange Type | KF | Seal Type | Bellows Seal |
Please check the type/dimensions/specifications of the part XLH-16-XN1A in the Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series series.Vui lòng kiểm tra kiểu/kích thước/thông số kỹ thuật của phần XLH-16-XN1A trong chuỗi Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series.
Part Number |
---|
XLH-16-XAP1A |
XLH-16-XAR1A |
XLH-16-XAR1B |
XLH-16-XP1A |
XLH-16-XP1B |
XLH-16-XP1C |
Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to ShipSố ngày giao hàng | RoHS | Flange Nominal | Sonic Speed Conductance | Seal material | Amount of leakage (Pa·m3/s) | Body Surface Treatment | Seal Change Location | Heater Yes/No |
---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | - | 16 | 5L/S | Barrel Perfluoro 70W | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, internal: anodic oxidation | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | - | 16 | 5L/S | Chemraz (Compound No.: SS592) | Internal: 1.3 × 10^-8 External: 1.3 × 10^-9 | External: hard anodized aluminum, internal: anodic oxidation | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | - | 16 | 5L/S | Chemraz (Compound No.: SS592) | Internal: 1.3 × 10^-8 External: 1.3 × 10^-11 | External: hard anodized aluminum, internal: anodic oxidation | Valve seal | None | ||
- | 1 Piece(s) | Quote | - | 16 | 5L/S | Barrel Perfluoro 70W | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | Valve seal / external seal | None | ||
- | 1 Piece(s) | Quote | - | 16 | 5L/S | Barrel Perfluoro 70W | Internal: 1.3 × 10-8, External: 1.3 × 10-11 | External: hard anodized aluminum, Internal: base material | Valve seal | None | ||
- | 1 Piece(s) | Quote | - | 16 | 5L/S | Barrel Perfluoro 70W | Internal: 1.3 × 10-10, External: 1.3 × 10-9 | External: hard anodized aluminum, Internal: base material | External seal | None |
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