(!) Since support from Microsoft will end on January 14th, 2020, Windows 7 will be excluded from the recommended environment from December 15th, 2019 on this site. Vì lý do Microsoft kết thúc hỗ trợ cho Windows 7 vào ngày 14/01/2020, Windows 7 sẽ là hệ điều hành không được khuyến khích sử dụng với trang web này từ ngày 15/12/2019.
Select part number to Order Now/ Add to Cart
Caution
thận trọng
A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.
Angle valve XMD Series external appearance
Angle valve XMD series pilot port direction
In-line type XYD series external appearance
In-line type XYD series pilot port direction
Model | XMD-25 XYD-25 | XMD-40 XYD-40 | XMD-50 XYD-50 | XMD-63 XYD-63 | XMD-80 XYD-80 | |
---|---|---|---|---|---|---|
Flange (Valve) Size | 25 | 40, CF070 | 50 | 63, CF114 | 80 | |
Valve Type | Always closed (pressurize to open and spring seal) (both main and initial exhaust valves) | |||||
Fluids | Inert gas vacuum | |||||
Operating Temperature (°C) | 5 to 60 (5 to 150 for high temperature type) | |||||
Operating Pressure Pa (abs) | 1 × 10-6 to atmospheric pressure | |||||
Conductance L/s Note 1 | Main Exhaust Valve | 14 | 45 | 80 | 160 | 200 |
Initial Exhaust Valve | 0.5 to 3 | 2 to 8 | 2.5 to 11 | 4 to 18 | 4 to 18 | |
Amount of leakage Pa·m3/s | Internal | For standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation | ||||
External | For standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation | |||||
Operating Time (s) | Main Exhaust Valve | 0.10 | 0.21 | 0.24 | 0.26 | 0.28 |
Initial Exhaust Valve | 0.70 | 0.08 | 0.09 | 0.23 | 0.27 | |
Flange Type | KF (NW) | KF (NW), CF | KF (NW) | KF (NW), K (DN), CF | KF (NW), K (DN) | |
Main Material Note 3 | Main body: SCS13 (SUS304 equivalent), Bellows: SUS316L, Major parts: SUS304, FKM (standard sealing material) | |||||
Pilot Pressure MPa (G) | 0.4 to 0.7 (both main and initial exhaust valves) | |||||
Pilot Port Connection Port Diameter | M5 | Rc 1/8 | ||||
Weight kg Note 2 | XMD | 0.65 | 1.50 (1.86) | 2.20 | 4.10 (5.46) | 6.80 |
XYD | 0.71 | 1.52 | 2.60 | 4.80 | 8.30 |
Note 1: The main exhaust valve conductance is the value for the “molecular flow” of an elbow with the same dimensions. The initial exhaust valve conductance is the “viscous flow” value.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.
Note 3: A coating of vacuum grease (Y-VAC2) has been applied to the seal-material sliding section (initial exhaust valve sliding part) of the vacuum part.
(Unit: mm)
XMD angle type dimensional drawing
XYD in-line type dimensional drawing
Model | A | B | C | D | Fn | Fd | Fc | G | H | J | K | P.C.D. L1 | L2 |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|
XMD-25 | 50 | 123 | 48 | 1 | 40 | - | - | 26 | 41 | 16 | 7.5 | - | - |
XMD-40 | 65 | 170 | 66 | 2 | 55 | - | 70 | 41 | 63 | 20 | 15 | P.C.D 58.7 | 6 × ø6.6 mm |
XMD-50 | 70 | 183 | 79 | 2 | 75 | - | - | 52 | 68 | 20 | 17.5 | - | - |
XMD-63 | 88 | 217 | 100 | 3 | 87 | 95 | 114 | 70 | 72 | 20 | 19.5 | P.C.D 92.1 | 8 × ø8.4 mm |
XMD-80 | 90 | 256 | 117 | 3 | 114 | 110 | - | 83 | 98 | 20 | 26.5 | - | - |
Model | A | B | C | D | E | Fn | Fd | G | H | J | K |
---|---|---|---|---|---|---|---|---|---|---|---|
XYD-25 | 100.2 | 86.7 | 48 | 1 | 23.5 | 40 | - | 26 | 66 | 16 | 7.5 |
XYD-40 | 130 | 114 | 66 | 2 | 38 | 55 | - | 41 | 84 | 20 | 15 |
XYD-50 | 178 | 128 | 79 | 2 | 53 | 75 | - | 52 | 95 | 20 | 17.5 |
XYD-63 | 209 | 163 | 100 | 3 | 61 | 87 | 95 | 70 | 121 | 20 | 19.5 |
XYD-80 | 268 | 193 | 117 | 3 | 80 | 114 | 110 | 83 | 144 | 20 | 26.5 |
XMD angle type diagram
XYD in-line type diagram
*Refer to p. 497 of the manufacturer's catalog for maintenance parts.
Graph showing number of adjustment nut rotations (pitch: 1 mm) and the initial exhaust valve conductance
Part Number |
---|
XMD-40KH0 |
Part Number | Price | Minimum Order Qty. | Volume Discount | Days to ShipSố ngày giao hàng | RoHS | Flange Type | Flange Nominal | Sonic Speed Conductance | Valve Type | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Seal Change Location | Length of Lead Wire for Switch (m) |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | - | KF | 40 | 45L/S | Angle type | Flange surface, left | 5 to 150 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - |
Loading...Tải…
Type | Pilot Vacuum Valve | Application | Single Use | Mounting Orientation | Direct |
---|---|---|---|---|---|
Number of Ports | 2-Port Valve | Switching Type | 2-Position Normally Closed | Pipe Port Type | Flange |
Seal Type | Bellows Seal |
Please check the type/dimensions/specifications of the part XMD-40KH0 in the Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD series.Vui lòng kiểm tra kiểu/kích thước/thông số kỹ thuật của phần XMD-40KH0 trong chuỗi Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD.
Part Number |
---|
XMD-25-A90LA-XT1A |
XMD-25-A93A |
XMD-25-A93LC |
XMD-40L |
XMD-40L-M9// |
XMD-40L-M9//-XQ1A |
Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to ShipSố ngày giao hàng | RoHS | Flange Type | Flange Nominal | Sonic Speed Conductance | Valve Type | Pilot Port Direction | Temperature Range (°C) | Switch Part Number | Number of Switches | Seal material | Amount of leakage (Pa·m3/s) | Seal Change Location | Length of Lead Wire for Switch (m) |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
- | 1 Piece(s) | Quote | - | KF | 25 | 14L/S | Angle type | Flange side | 5 to 60 | D-A90 reed auto switch | 2 pcs. valve open/closed | FKM for Plasma 3310-75 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal / S valve seal assembly / O-ring for fixing | 3 | ||
- | 1 Piece(s) | Quote | - | KF | 25 | 14L/S | Angle type | Flange side | 5 to 60 | D-A93 reed auto switch | 2 pcs. valve open/closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 0.5 | ||
- | 1 Piece(s) | Quote | - | KF | 25 | 14L/S | Angle type | Flange side | 5 to 60 | D-A93 reed auto switch | 1 pc. valve closed | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | 3 | ||
- | 1 Piece(s) | Quote | - | KF | 40 | 45L/S | Angle type | Flange surface, back | 5 to 60 | No auto-switch (no built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | ||
- | 1 Piece(s) | Quote | - | KF | 40 | 45L/S | Angle type | Flange surface, back | 5 to 60 | No auto-switch (with built-in magnet) | No switch | FKM 1349-80 | Internal: 1.3 × 10-10, External: 1.3 × 10-11 | None | - | ||
- | 1 Piece(s) | Quote | - | KF | 40 | 45L/S | Angle type | Flange surface, back | 5 to 60 | No auto-switch (with built-in magnet) | No switch | Kalrez 4079 | Internal: 1.3 × 10-8, External: 1.3 × 10-9 | Valve seal / external seal / S valve seal assembly / O-ring for fixing | - |
How can we improve?
How can we improve?
While we are not able to respond directly to comments submitted in this form, the information will be reviewed for future improvement.
Customer Privacy Policy
Thank you for your cooperation.
While we are not able to respond directly to comments submitted in this form, the information will be reviewed for future improvement.
Please use the inquiry form.
Customer Privacy Policy