SMC Vacuum Valves（Driving Type：Directly Operated）

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  Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)

  SMC

  A normally closed type high vacuum solenoid valve with reduced particulate matter and improved sealing performance.[Features]・ Flame-retardant (UL94 V-0 compliant)・ Two types of fittings (face seal fittings / compression fittings) and female threads (Rc, NPT) are available・ By moving the spring from the sliding part of the armature to the body part, dust generation due to contact with the spring has been reduced・ Securely seals with a large spring force・ Power consumption *: 4.5 W (size 1) / 7 W (size 2) / 10.5 W (Size 3) (* For DC specifications / B type. )・ Operating temperature range: 5 to 60℃

  CAD ：

  2D / 3D

  Type	Application	Mounting Orientation	Number of Ports	Solenoid Type	Switching Type	Driving Type	Effective Sectional Area(mm2)	Pipe Port Type	Plumbing Thread Nominal	Connecting Tube Diameter	Flange Type	Flange Nominal	CV Value
  High Vacuum Solenoid	Single Use	Direct	2-Port Valve	Single	2-Position Normally Closed	Directly Operated	-	Rc / NPT / Face Seal Fitting / Compression Fitting	1/8 / 1/4 / 3/8	-	-	-	-

  Days to Ship: Số ngày giao hàng: 25 Day(s) or more

  25 Day(s) or more

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  Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)

  SMC

  A high vacuum angle valve that requires no air to drive, enabling use in portable equipment. [Features] · Uses no sliding metal parts, minimizing particulate matter. · The pressure balance mechanism allows an unrestricted exhaust direction. · A control power supply circuit for solenoid valve drive is now standard. · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time. · Does not contain heavy metals such as Ni (nickel) or Cr (chrome). · Low sputtering yield minimizes heavy metal contamination of wafers.

  CAD ：

  2D / 3D

  Type	Application	Mounting Orientation	Number of Ports	Solenoid Type	Switching Type	Driving Type	Effective Sectional Area(mm2)	Pipe Port Type	Plumbing Thread Nominal	Connecting Tube Diameter	Flange Type	Flange Nominal	CV Value
  Solenoid Valve	Single Use	Direct	2-Port Valve	Single	2-Position Normally Closed	Directly Operated	-	Flange	-	-	KF	16 / 25	-

  Days to Ship: Số ngày giao hàng: 32 Day(s) or more

  32 Day(s) or more

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  Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve

  SMC

  A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded. [Features] · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve). · Allows for compact system designs and reduced piping. · Prevents dust turbulence inside the chamber when exhausting. · Adjustable flow rate for initial exhaust valve. · Air-operated type with solenoid valve. · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time. · Does not contain heavy metals such as Ni (nickel) or Cr (chrome). · Low sputtering yield minimizes heavy metal contamination of wafers.

  CAD ：

  2D / 3D

  Type	Application	Mounting Orientation	Number of Ports	Solenoid Type	Switching Type	Driving Type	Effective Sectional Area(mm2)	Pipe Port Type	Plumbing Thread Nominal	Connecting Tube Diameter	Flange Type	Flange Nominal	CV Value
  High Vacuum Solenoid	Single Use	Direct	2-Port Valve	Single	2-Position Normally Closed	Directly Operated	-	Flange	-	-	KF / K	25 / 40 / 50 / 63 / 80	-

  Days to Ship: Số ngày giao hàng: 31 Day(s) or more

  31 Day(s) or more

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  Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve

  SMC

  [Features] · Aluminum body · Uniform baking temperature · Lightweight and compact · Low outgassing · Little heavy metal contamination · Resistant to fluorine corrosion · Replaceable bellows (bellows-seal type)

  CAD ：

  2D / 3D

  Type	Application	Mounting Orientation	Number of Ports	Solenoid Type	Switching Type	Driving Type	Effective Sectional Area(mm2)	Pipe Port Type	Plumbing Thread Nominal	Connecting Tube Diameter	Flange Type	Flange Nominal	CV Value
  High Vacuum Solenoid	Single Use	Direct	2-Port Valve	Single	2-Position Normally Closed	Directly Operated	-	Flange	-	-	KF / K	16 / 25 / 40 / 50 / 63 / 80	-

  Days to Ship: Số ngày giao hàng: 25 Day(s) or more

  25 Day(s) or more

BrandNhãn hiệu
Product SeriesDòng sản phẩm
CADCAD
From
Days to ShipSố ngày giao hàng
Type
Application
Mounting Orientation
Number of Ports
Solenoid Type
Switching Type
Driving Type
Effective Sectional Area(mm2)
Pipe Port Type
Plumbing Thread Nominal
Connecting Tube Diameter
Flange Type
Flange Nominal
CV Value

	You can add up to 6 items per a category to the compare list.Compare	You can add up to 6 items per a category to the compare list.Compare	You can add up to 6 items per a category to the compare list.Compare	You can add up to 6 items per a category to the compare list.Compare
BrandNhãn hiệu	SMC	SMC	SMC	SMC
Product SeriesDòng sản phẩm	Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)	Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)	Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve	Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve
CADCAD	2D / 3D	2D / 3D	2D / 3D	2D / 3D
From	-	-	-	-
Days to ShipSố ngày giao hàng	25 Day(s) or more	32 Day(s) or more	31 Day(s) or more	25 Day(s) or more
Type	High Vacuum Solenoid	Solenoid Valve	High Vacuum Solenoid	High Vacuum Solenoid
Application	Single Use	Single Use	Single Use	Single Use
Mounting Orientation	Direct	Direct	Direct	Direct
Number of Ports	2-Port Valve	2-Port Valve	2-Port Valve	2-Port Valve
Solenoid Type	Single	Single	Single	Single
Switching Type	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed	2-Position Normally Closed
Driving Type	Directly Operated	Directly Operated	Directly Operated	Directly Operated
Effective Sectional Area(mm2)	-	-	-	-
Pipe Port Type	Rc / NPT / Face Seal Fitting / Compression Fitting	Flange	Flange	Flange
Plumbing Thread Nominal	1/8 / 1/4 / 3/8	-	-	-
Connecting Tube Diameter	-	-	-	-
Flange Type	-	KF	KF / K	KF / K
Flange Nominal	-	16 / 25	25 / 40 / 50 / 63 / 80	16 / 25 / 40 / 50 / 63 / 80
CV Value	-	-	-	-

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