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Vacuum Valves（Flange Type：KF）
Blocking valves: These valves are used to isolate vacuum sections and block pressure differentials and come in various types, such as gate valves, L type valves, straight valves, and butterfly valves, to suit the possible pressure zones and applications within a vacuum system.
Conductance valves: needle valves and butterfly valves (used to control the flow rate of gas entering the empty chamber.)
The term "valve" itself is a generic term for things that control the flow of liquid or gas in pipe networks, controlling the fluid direction, pressure, and flow rate
From L type valves through to gate valve and from atmospheric pressure through to vacuum pressures, valves for all types of areas, conditions, and applications are available, including those for ultra-high vacuum levels.
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11 itemsMặt hàng
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SMC
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.[Features]· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)・ Achieves system compactness and piping savings・ Prevents dust from rolling up in the chamber when exhausting・ Adjustable initial exhaust valve flow rate・ Air operated type / with solenoid valve・ Since there is little outgas, the pump capacity can be small and the exhaust time can be shortened・ It does not contain heavy metals such as Ni (nickel) and Cr (chromium), and the sputtering rate is low, so there is little heavy metal contamination on the wafer・ Strong against fluorine· Uniform baking temperature. Good thermal conductivity, uniform temperature throughout the body, drastically reducing product adhesion· Lightweight and compact
Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value Air-Actuated Vacuum Valve Single Use Direct 2-Port Valve - 2-Position Normally Closed - - Flange - - KF 25 / 40 / 50 / 63 / 80 - Days to Ship: Số ngày giao hàng: 25 Day(s) or more 
25 Day(s) or more
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You can add up to 6 items per a category to the compare list.
Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve
SMC
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded. [Features] · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve). · Allows for compact system designs and reduced piping. · Prevents dust turbulence inside the chamber when exhausting. · Adjustable flow rate for initial exhaust valve. · Air-operated type with solenoid valve. · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time. · Does not contain heavy metals such as Ni (nickel) or Cr (chrome). · Low sputtering yield minimizes heavy metal contamination of wafers.
Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value High Vacuum Solenoid Single Use Direct 2-Port Valve Single 2-Position Normally Closed Directly Operated - Flange - - KF 25 / 40 / 50 / 63 / 80 - Days to Ship: Số ngày giao hàng: 31 Day(s) or more
31 Day(s) or more
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You can add up to 6 items per a category to the compare list.
SMC
Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation. [Features] · Bellows type is particulate-free and cleaned. · Pressure balanced structure. · Body material: SCS13 (SUS304 equivalent). · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.
Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value Pilot Vacuum Valve Single Use Direct 2-Port Valve - 2-Position Normally Closed - - Flange - - KF 16 / 25 / 40 / 50 / 63 / 80 - Days to Ship: Số ngày giao hàng: 25 Day(s) or more
25 Day(s) or more
-
You can add up to 6 items per a category to the compare list.
Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series
SMC
[Features] · Aluminum body · Uniform baking temperature · Lightweight and compact · Low outgassing · Little heavy metal contamination · Resistant to fluorine corrosion · Replaceable bellows (bellows-seal type)
Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value Pilot Vacuum Valve Single Use Direct 2-Port Valve - 2-Position Normally Closed - - Flange - - KF 16 / 25 / 40 / 50 / 63 / 80 - Days to Ship: Số ngày giao hàng: 25 Day(s) or more
25 Day(s) or more
-
You can add up to 6 items per a category to the compare list.
Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series
SMC
[Features] · Aluminum body · Uniform baking temperature · Lightweight and compact · Low outgassing · Little heavy metal contamination · Resistant to fluorine corrosion · Replaceable bellows (bellows-seal type)
Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value Pilot Vacuum Valve Single Use Direct 2-Port Valve - 2-Position Normally Closed - - Flange - - KF 16 / 25 / 40 / 50 / 63 / 80 - Days to Ship: Số ngày giao hàng: 25 Day(s) or more
25 Day(s) or more
-
You can add up to 6 items per a category to the compare list.
Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series
SMC
A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction. [Features] · Bellows type is particulate-free and cleaned. · Low actuation torque (0.5 N·m or less). · Spring provides a standard sealing load. · Handle height remains the same regardless of whether valve is open or closed. · Equipped as standard with an indicator for confirming if the valve is open or closed. · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time. · Does not contain heavy metals such as Ni (nickel) or Cr (chrome). · Low sputtering yield minimizes heavy metal contamination of wafers.
Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value Manual Vacuum Valve Single Use Direct 2-Port Valve - 2-Position Normally Closed - - Flange - - KF 16 / 25 / 40 / 50 - Days to Ship: Số ngày giao hàng: 32 Day(s) or more
32 Day(s) or more
-
You can add up to 6 items per a category to the compare list.
SMC
[Features] · Aluminum body · Uniform baking temperature · Lightweight and compact · Low outgassing · Little heavy metal contamination · Resistant to fluorine corrosion · Replaceable bellows (bellows-seal type)
Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value High Vacuum Solenoid Single Use Direct 2-Port Valve Single 2-Position Normally Closed Directly Operated - Flange - - KF 16 / 25 / 40 / 50 / 63 / 80 - Days to Ship: Số ngày giao hàng: 25 Day(s) or more
25 Day(s) or more
-
You can add up to 6 items per a category to the compare list.
SMC
A vacuum valve for preventing pumps from running when overloaded. [Features] · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve) · Allows for compact system designs and reduced piping. · Prevents dust turbulence inside the chamber when exhausting. · Adjustable flow rate for initial exhaust valve. · Body material: SCS13 (SUS304 equivalent). · Precision-cast single-piece structure which helps prevent gas accumulation. · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.
Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value Pilot Vacuum Valve Single Use Direct 2-Port Valve - 2-Position Normally Closed - - Flange - - KF 25 / 40 / 50 / 63 / 80 - Days to Ship: Số ngày giao hàng: 32 Day(s) or more
32 Day(s) or more
-
You can add up to 6 items per a category to the compare list.
Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)
SMC
A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction. [Features] · Bellows type is particulate-free and cleaned. · Low actuation torque (0.5 N·m or less). · Spring provides a standard sealing load. · Handle height remains the same regardless of whether valve is open or closed. · Equipped as standard with an indicator for confirming if the valve is open or closed. · Body material: SCS13 (SUS304 equivalent). · Precision-cast single-piece structure which helps prevent gas accumulation. · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.
Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value Manual Vacuum Valve Single Use Direct 2-Port Valve - 2-Position Normally Closed - - Flange - - KF 16 / 25 / 40 / 50 - Days to Ship: Số ngày giao hàng: 32 Day(s) or more
32 Day(s) or more
-
You can add up to 6 items per a category to the compare list.
Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series
SMC
[Features] · Aluminum body · Uniform baking temperature · Lightweight and compact · Low outgassing · Little heavy metal contamination · Resistant to fluorine corrosion · Replaceable bellows (bellows-seal type)
Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value Pilot Vacuum Valve Single Use Direct 2-Port Valve - 2-Position Normally Closed - - Flange - - KF 16 / 25 / 40 / 50 / 63 / 80 - Days to Ship: Số ngày giao hàng: 51 Day(s) or more
51 Day(s) or more
-
You can add up to 6 items per a category to the compare list.
Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)
SMC
A high vacuum angle valve that requires no air to drive, enabling use in portable equipment. [Features] · Uses no sliding metal parts, minimizing particulate matter. · The pressure balance mechanism allows an unrestricted exhaust direction. · A control power supply circuit for solenoid valve drive is now standard. · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time. · Does not contain heavy metals such as Ni (nickel) or Cr (chrome). · Low sputtering yield minimizes heavy metal contamination of wafers.
Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value Solenoid Valve Single Use Direct 2-Port Valve Single 2-Position Normally Closed Directly Operated - Flange - - KF 16 / 25 - Days to Ship: Số ngày giao hàng: 32 Day(s) or more
32 Day(s) or more
| BrandNhãn hiệu |
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| Product SeriesDòng sản phẩm |
| CADCAD |
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| Days to ShipSố ngày giao hàng |
| Type |
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| Number of Ports |
| Solenoid Type |
| Switching Type |
| Driving Type |
| Effective Sectional Area(mm2) |
| Pipe Port Type |
| Plumbing Thread Nominal |
| Connecting Tube Diameter |
| Flange Type |
| Flange Nominal |
| CV Value |
You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | You can add up to 6 items per a category to the compare list.  | |
| BrandNhãn hiệu | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC |
| Product SeriesDòng sản phẩm | Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve | Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series | Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series | Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series | Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal) | Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series | Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance) | ||||
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| Days to ShipSố ngày giao hàng | 25 Day(s) or more | 31 Day(s) or more | 25 Day(s) or more | 25 Day(s) or more | 25 Day(s) or more | 32 Day(s) or more | 25 Day(s) or more | 32 Day(s) or more | 32 Day(s) or more | 51 Day(s) or more | 32 Day(s) or more |
| Type | Air-Actuated Vacuum Valve | High Vacuum Solenoid | Pilot Vacuum Valve | Pilot Vacuum Valve | Pilot Vacuum Valve | Manual Vacuum Valve | High Vacuum Solenoid | Pilot Vacuum Valve | Manual Vacuum Valve | Pilot Vacuum Valve | Solenoid Valve |
| Application | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use |
| Mounting Orientation | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct |
| Number of Ports | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve |
| Solenoid Type | - | Single | - | - | - | - | Single | - | - | - | Single |
| Switching Type | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed |
| Driving Type | - | Directly Operated | - | - | - | - | Directly Operated | - | - | - | Directly Operated |
| Effective Sectional Area(mm2) | - | - | - | - | - | - | - | - | - | - | - |
| Pipe Port Type | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange |
| Plumbing Thread Nominal | - | - | - | - | - | - | - | - | - | - | - |
| Connecting Tube Diameter | - | - | - | - | - | - | - | - | - | - | - |
| Flange Type | KF | KF | KF | KF | KF | KF | KF | KF | KF | KF | KF |
| Flange Nominal | 25 / 40 / 50 / 63 / 80 | 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 | 16 / 25 / 40 / 50 / 63 / 80 | 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 |
| CV Value | - | - | - | - | - | - | - | - | - | - | - |
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ConfigureTạo
Specification/DimensionsĐặc điểm kỹ thuật / Kích thướcĐặc điểm kỹ thuật / Kích thước
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Type
- Solenoid Valve
- High Vacuum Solenoid
- Manual Vacuum Valve
- Mechanically-Operated Vacuum Valve
- Pilot Vacuum Valve
- Air-Actuated Vacuum Valve
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Application
- Single Use
- Multi-Port
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Mounting Orientation
- Direct
- Manifold Base
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Number of Ports
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2-Port Valve
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3-Port Valve
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2-Port Valve
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Solenoid Type
- Single
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Switching Type
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2-Position Normally Open
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2-Position Normally Closed
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Others
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2-Position Normally Open
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Driving Type
- Directly Operated
- External Pilot Shape
- Air Pilot
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Effective Sectional Area(mm2)
The Diameter of the A / B Port Connection Tube
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Pipe Port Type
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Plumbing Thread Nominal
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Connecting Tube Diameter
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Flange Type
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Flange Nominal
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CV Value
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