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Vacuum Valves(Flange Type:KF)

Vacuum valves are a type of valve attached to vacuum chambers. Vacuum valves must block gas components almost completely or must be precisely controlled compared with regular valves.
Blocking valves: These valves are used to isolate vacuum sections and block pressure differentials and come in various types, such as gate valves, L type valves, straight valves, and butterfly valves, to suit the possible pressure zones and applications within a vacuum system.
Conductance valves: needle valves and butterfly valves (used to control the flow rate of gas entering the empty chamber.)
The term "valve" itself is a generic term for things that control the flow of liquid or gas in pipe networks, controlling the fluid direction, pressure, and flow rate
From L type valves through to gate valve and from atmospheric pressure through to vacuum pressures, valves for all types of areas, conditions, and applications are available, including those for ultra-high vacuum levels.
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11 itemsMặt hàng

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  • You can add up to 6 items per a category to the compare list.

    Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

    Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

    SMC

    A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.[Features]· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)・ Achieves system compactness and piping savings・ Prevents dust from rolling up in the chamber when exhausting・ Adjustable initial exhaust valve flow rate・ Air operated type / with solenoid valve・ Since there is little outgas, the pump capacity can be small and the exhaust time can be shortened・ It does not contain heavy metals such as Ni (nickel) and Cr (chromium), and the sputtering rate is low, so there is little heavy metal contamination on the wafer・ Strong against fluorine· Uniform baking temperature. Good thermal conductivity, uniform temperature throughout the body, drastically reducing product adhesion· Lightweight and compact

    CAD :
    2D / 3D
    Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value
    Air-Actuated Vacuum Valve Single Use Direct 2-Port Valve - 2-Position Normally Closed - - Flange - - KF 25 / 40 / 50 / 63 / 80 -
    Days to Ship: Số ngày giao hàng: 25 Day(s) or more
    day to ship 25 Day(s) or more
  • You can add up to 6 items per a category to the compare list.

    Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve

    Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve

    SMC

    A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded. [Features] · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve). · Allows for compact system designs and reduced piping. · Prevents dust turbulence inside the chamber when exhausting. · Adjustable flow rate for initial exhaust valve. · Air-operated type with solenoid valve. · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time. · Does not contain heavy metals such as Ni (nickel) or Cr (chrome). · Low sputtering yield minimizes heavy metal contamination of wafers.

    CAD :
    2D / 3D
    Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value
    High Vacuum Solenoid Single Use Direct 2-Port Valve Single 2-Position Normally Closed Directly Operated - Flange - - KF 25 / 40 / 50 / 63 / 80 -
    Days to Ship: Số ngày giao hàng: 31 Day(s) or more
    day to ship 31 Day(s) or more
  • You can add up to 6 items per a category to the compare list.

    Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series

    Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series

    SMC

    Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation. [Features] · Bellows type is particulate-free and cleaned. · Pressure balanced structure. · Body material: SCS13 (SUS304 equivalent). · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

    CAD :
    2D / 3D
    Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value
    Pilot Vacuum Valve Single Use Direct 2-Port Valve - 2-Position Normally Closed - - Flange - - KF 16 / 25 / 40 / 50 / 63 / 80 -
    Days to Ship: Số ngày giao hàng: 25 Day(s) or more
    day to ship 25 Day(s) or more
  • You can add up to 6 items per a category to the compare list.

    Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series

    Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series

    SMC

    [Features] · Aluminum body · Uniform baking temperature · Lightweight and compact · Low outgassing · Little heavy metal contamination · Resistant to fluorine corrosion · Replaceable bellows (bellows-seal type)

    CAD :
    2D / 3D
    Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value
    Pilot Vacuum Valve Single Use Direct 2-Port Valve - 2-Position Normally Closed - - Flange - - KF 16 / 25 / 40 / 50 / 63 / 80 -
    Days to Ship: Số ngày giao hàng: 25 Day(s) or more
    day to ship 25 Day(s) or more
  • You can add up to 6 items per a category to the compare list.

    Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series

    Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series

    SMC

    A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction. [Features] · Bellows type is particulate-free and cleaned. · Low actuation torque (0.5 N·m or less). · Spring provides a standard sealing load. · Handle height remains the same regardless of whether valve is open or closed. · Equipped as standard with an indicator for confirming if the valve is open or closed. · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time. · Does not contain heavy metals such as Ni (nickel) or Cr (chrome). · Low sputtering yield minimizes heavy metal contamination of wafers.

    CAD :
    2D / 3D
    Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value
    Manual Vacuum Valve Single Use Direct 2-Port Valve - 2-Position Normally Closed - - Flange - - KF 16 / 25 / 40 / 50 -
    Days to Ship: Số ngày giao hàng: 32 Day(s) or more
    day to ship 32 Day(s) or more
  • You can add up to 6 items per a category to the compare list.

    Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series

    Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series

    SMC

    [Features] · Aluminum body · Uniform baking temperature · Lightweight and compact · Low outgassing · Little heavy metal contamination · Resistant to fluorine corrosion · Replaceable bellows (bellows-seal type)

    CAD :
    2D / 3D
    Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value
    Pilot Vacuum Valve Single Use Direct 2-Port Valve - 2-Position Normally Closed - - Flange - - KF 16 / 25 / 40 / 50 / 63 / 80 -
    Days to Ship: Số ngày giao hàng: 25 Day(s) or more
    day to ship 25 Day(s) or more
  • You can add up to 6 items per a category to the compare list.

    Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve

    Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve

    SMC

    [Features] · Aluminum body · Uniform baking temperature · Lightweight and compact · Low outgassing · Little heavy metal contamination · Resistant to fluorine corrosion · Replaceable bellows (bellows-seal type)

    CAD :
    2D / 3D
    Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value
    High Vacuum Solenoid Single Use Direct 2-Port Valve Single 2-Position Normally Closed Directly Operated - Flange - - KF 16 / 25 / 40 / 50 / 63 / 80 -
    Days to Ship: Số ngày giao hàng: 25 Day(s) or more
    day to ship 25 Day(s) or more
  • You can add up to 6 items per a category to the compare list.

    Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

    Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

    SMC

    A vacuum valve for preventing pumps from running when overloaded. [Features] · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve) · Allows for compact system designs and reduced piping. · Prevents dust turbulence inside the chamber when exhausting. · Adjustable flow rate for initial exhaust valve. · Body material: SCS13 (SUS304 equivalent). · Precision-cast single-piece structure which helps prevent gas accumulation. · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

    CAD :
    2D / 3D
    Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value
    Pilot Vacuum Valve Single Use Direct 2-Port Valve - 2-Position Normally Closed - - Flange - - KF 25 / 40 / 50 / 63 / 80 -
    Days to Ship: Số ngày giao hàng: 32 Day(s) or more
    day to ship 32 Day(s) or more
  • You can add up to 6 items per a category to the compare list.

    Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)

    Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)

    SMC

    A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction. [Features] · Bellows type is particulate-free and cleaned. · Low actuation torque (0.5 N·m or less). · Spring provides a standard sealing load. · Handle height remains the same regardless of whether valve is open or closed. · Equipped as standard with an indicator for confirming if the valve is open or closed. · Body material: SCS13 (SUS304 equivalent). · Precision-cast single-piece structure which helps prevent gas accumulation. · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

    CAD :
    2D / 3D
    Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value
    Manual Vacuum Valve Single Use Direct 2-Port Valve - 2-Position Normally Closed - - Flange - - KF 16 / 25 / 40 / 50 -
    Days to Ship: Số ngày giao hàng: 32 Day(s) or more
    day to ship 32 Day(s) or more
  • You can add up to 6 items per a category to the compare list.

    Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

    Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

    SMC

    [Features] · Aluminum body · Uniform baking temperature · Lightweight and compact · Low outgassing · Little heavy metal contamination · Resistant to fluorine corrosion · Replaceable bellows (bellows-seal type)

    CAD :
    2D / 3D
    Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value
    Pilot Vacuum Valve Single Use Direct 2-Port Valve - 2-Position Normally Closed - - Flange - - KF 16 / 25 / 40 / 50 / 63 / 80 -
    Days to Ship: Số ngày giao hàng: 51 Day(s) or more
    day to ship 51 Day(s) or more
  • You can add up to 6 items per a category to the compare list.

    Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)

    Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)

    SMC

    A high vacuum angle valve that requires no air to drive, enabling use in portable equipment. [Features] · Uses no sliding metal parts, minimizing particulate matter. · The pressure balance mechanism allows an unrestricted exhaust direction. · A control power supply circuit for solenoid valve drive is now standard. · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time. · Does not contain heavy metals such as Ni (nickel) or Cr (chrome). · Low sputtering yield minimizes heavy metal contamination of wafers.

    CAD :
    2D / 3D
    Type Application Mounting Orientation Number of Ports Solenoid Type Switching Type Driving Type Effective Sectional Area(mm2) Pipe Port Type Plumbing Thread Nominal Connecting Tube Diameter Flange Type Flange Nominal CV Value
    Solenoid Valve Single Use Direct 2-Port Valve Single 2-Position Normally Closed Directly Operated - Flange - - KF 16 / 25 -
    Days to Ship: Số ngày giao hàng: 32 Day(s) or more
    day to ship 32 Day(s) or more
BrandNhãn hiệu
Product SeriesDòng sản phẩm
CADCAD
From
Days to ShipSố ngày giao hàng
Type
Application
Mounting Orientation
Number of Ports
Solenoid Type
Switching Type
Driving Type
Effective Sectional Area(mm2)
Pipe Port Type
Plumbing Thread Nominal
Connecting Tube Diameter
Flange Type
Flange Nominal
CV Value

    You can add up to 6 items per a category to the compare list.

    Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

        You can add up to 6 items per a category to the compare list.

        Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve

            You can add up to 6 items per a category to the compare list.

            Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series

                You can add up to 6 items per a category to the compare list.

                Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series

                    You can add up to 6 items per a category to the compare list.

                    Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series

                        You can add up to 6 items per a category to the compare list.

                        Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series

                            You can add up to 6 items per a category to the compare list.

                            Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve

                                You can add up to 6 items per a category to the compare list.

                                Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

                                    You can add up to 6 items per a category to the compare list.

                                    Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)

                                        You can add up to 6 items per a category to the compare list.

                                        Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

                                            You can add up to 6 items per a category to the compare list.

                                            Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)
                                              BrandNhãn hiệu

                                              SMC

                                              SMC

                                              SMC

                                              SMC

                                              SMC

                                              SMC

                                              SMC

                                              SMC

                                              SMC

                                              SMC

                                              SMC

                                              Product SeriesDòng sản phẩm

                                              Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

                                              Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve

                                              Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series

                                              Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series

                                              Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series

                                              Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series

                                              Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve

                                              Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

                                              Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)

                                              Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

                                              Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)

                                              CADCAD
                                              • 2D / 3D
                                              • 2D / 3D
                                              • 2D / 3D
                                              • 2D / 3D
                                              • 2D / 3D
                                              • 2D / 3D
                                              • 2D / 3D
                                              • 2D / 3D
                                              • 2D / 3D
                                              • 2D / 3D
                                              • 2D / 3D
                                              From
                                              Days to ShipSố ngày giao hàng 25 Day(s) or more 31 Day(s) or more 25 Day(s) or more 25 Day(s) or more 32 Day(s) or more 25 Day(s) or more 25 Day(s) or more 32 Day(s) or more 32 Day(s) or more 51 Day(s) or more 32 Day(s) or more
                                              TypeAir-Actuated Vacuum ValveHigh Vacuum SolenoidPilot Vacuum ValvePilot Vacuum ValveManual Vacuum ValvePilot Vacuum ValveHigh Vacuum SolenoidPilot Vacuum ValveManual Vacuum ValvePilot Vacuum ValveSolenoid Valve
                                              ApplicationSingle UseSingle UseSingle UseSingle UseSingle UseSingle UseSingle UseSingle UseSingle UseSingle UseSingle Use
                                              Mounting OrientationDirectDirectDirectDirectDirectDirectDirectDirectDirectDirectDirect
                                              Number of Ports2-Port Valve2-Port Valve2-Port Valve2-Port Valve2-Port Valve2-Port Valve2-Port Valve2-Port Valve2-Port Valve2-Port Valve2-Port Valve
                                              Solenoid Type-Single----Single---Single
                                              Switching Type2-Position Normally Closed2-Position Normally Closed2-Position Normally Closed2-Position Normally Closed2-Position Normally Closed2-Position Normally Closed2-Position Normally Closed2-Position Normally Closed2-Position Normally Closed2-Position Normally Closed2-Position Normally Closed
                                              Driving Type-Directly Operated----Directly Operated---Directly Operated
                                              Effective Sectional Area(mm2)-----------
                                              Pipe Port TypeFlangeFlangeFlangeFlangeFlangeFlangeFlangeFlangeFlangeFlangeFlange
                                              Plumbing Thread Nominal-----------
                                              Connecting Tube Diameter-----------
                                              Flange TypeKFKFKFKFKFKFKFKFKFKFKF
                                              Flange Nominal25 / 40 / 50 / 63 / 8025 / 40 / 50 / 63 / 8016 / 25 / 40 / 50 / 63 / 8016 / 25 / 40 / 50 / 63 / 8016 / 25 / 40 / 5016 / 25 / 40 / 50 / 63 / 8016 / 25 / 40 / 50 / 63 / 8025 / 40 / 50 / 63 / 8016 / 25 / 40 / 5016 / 25 / 40 / 50 / 63 / 8016 / 25
                                              CV Value-----------

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